Application of the shadow moire method to studi the relief of plates
https://doi.org/10.52170/1815-9265_2025_75_97
Abstract
The purpose of this work is to develop a method for rejecting semiconductor wafers based on determining their relief. Optical research methods based on the moiré effect are widely used to study the relief of various bodies, but the sensitivity of traditional moiré methods is low for assessing the quality of semiconductor wafers. For this purpose, it is proposed to use the shadow moire method using high-frequency rasters. In this case, it is not correct to describe the pattern of the recorded fringes based on the postulates of “mechanical” interference used in traditional moiré.
The article presents the derivation of resolving equations for patterns of fringes observed in the first order of diffraction, based on the laws of diffraction when optical fibers pass through a reference raster and their further interference after reflection from the surface under study. When deriving the equations, it was assumed that the position of the observed bands is determined by the interference of waves diffracted into the zero and first orders of diffraction during the first and second passage of the reference raster. The results of a study of the relief of flint wafers with various defects are presented. The diameter of the plates under study was 60 mm, and a reference raster with a frequency of 200 lines per millimeter was used. In the optical scheme used for recording moiré patterns, a He-Ne laser LG-38 was used. Diagrams of the relief of the plates in selected sections based on the relief of their surface are presented.
The conducted studies showed that the proposed method allows for preliminary rejection of plates. The dimensions of the semiconductor wafers under study are limited by the dimensions of the optical circuit elements used.
About the Authors
A. M. Popov
Siberian Transport University
Russian Federation
Russian Federation
Anatoly M. Popov – Doctor of Engineering, Professor, Head of the Theoretical Mechanics Department
Novosibirsk
V. B. Zinoviev
Siberian Transport University
Russian Federation
Russian Federation
Vladimir B. Zinovyev – Candidate of Engineering, Associate Professor, Associate Professor of the Theoretical Mechanics Department
Novosibirsk
S. I. Gerasimov
Siberian Transport University
Russian Federation
Russian Federation
Sergey I. Gerasimov – Doctor of Engineering, Professor, Head of the Structural Mechanics Department
Novosibirsk
V. M. Tikhomirov
Siberian Transport University
Russian Federation
Russian Federation
Victor M. Tikhomirov – Doctor of Engineering, Associate Professor, Professor of the Structural Mechanics Department
Novosibirsk
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Review
For citations:
Popov A.M., Zinoviev V.B., Gerasimov S.I., Tikhomirov V.M. Application of the shadow moire method to studi the relief of plates. Bulletin of Siberian State University of Transport. 2025;(3):97-103. (In Russ.) https://doi.org/10.52170/1815-9265_2025_75_97
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